Ph.D. research of Youry Borisenkov

Micro-electro-mechanical-systems (MEMS)

Microelectromechanical systems (MEMS) is the technology of the very small, and merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems Technology - MST (in Europe). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS are made up of components between 1 to 100 micrometers in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from a 20 micrometers (20 millionth of a meter) to a millimeter. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors. At these size scales, the standard constructs of classical physics do not always hold true. Due to MEMS’ large surface area to volume ratio, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass.

More info at Wikipedia

Micro flow sensing technologies available

  • Optical - microPIV, microPTV, etc.
  • Mechanical - wall shear sensors

First design

First successful manufacturing

More photos